Box Size：1220mm(L) x 750mm(W) x 900mm(H)

Box Support height： 900mm

Box Material： 304 Stainless Steel (Type 304), thickness 3mm

Power Supply ：110 - 220V AC, 50/60Hz, Single-phase

Environment of Box inside ：H2O <1 ppm (20°C/68 ℉, 1 atm)，O2 <1 ppm (20°C/68 ℉, 1 atm)

Antechamber

Main chamber size： Φ360mm (Dia.)x 600mm(length)（location: right-side of box）

Mini chamber size： Φ150 mm(Dia.) x 300mm(L)(location: right-side of box)

Pressure control system ：Box pressure can be auto controlled by PLC touch screen，Control accuracy:±1Pa，Can also be manually controlled by foot switch

Filter system ：The ends of inlet and outlet both are provided with filter，The filter precision is: 0.3 μm

Box Size：1500mm(L) x 750mm(W) x 900mm(H)

Box Support height： 900mm

Box Material： 304 Stainless Steel (Type 304), thickness 3mm

Power Supply ：110 - 220V AC, 50/60Hz, Single-phase

Environment of Box inside ：H2O <1 ppm (20°C/68 ℉, 1 atm)，O2 <1 ppm (20°C/68 ℉, 1 atm)

Antechamber

Main chamber size： Φ360mm (Dia.)x 600mm(length)（location: right-side of box）

Mini chamber size： Φ150 mm(Dia.) x 300mm(L)(location: right-side of box)

Pressure control system ：Box pressure can be auto controlled by PLC touch screen，Control accuracy:±1Pa，Can also be manually controlled by foot switch

Filter system ：The ends of inlet and outlet both are provided with filter，The filter precision is: 0.3 μm

Box Size：1800mm(L) x 750mm(W) x 900mm(H)

Box Support height： 900mm

Box Material： 304 Stainless Steel (Type 304), thickness 3mm

Power Supply ：110 - 220V AC, 50/60Hz, Single-phase

Environment of Box inside ：H2O <1 ppm (20°C/68 ℉, 1 atm)，O2 <1 ppm (20°C/68 ℉, 1 atm)

Antechamber

Main chamber size： Φ360mm (Dia.)x 600mm(length)（location: right-side of box）

Mini chamber size： Φ150 mm(Dia.) x 300mm(L)(location: right-side of box)

Pressure control system ：Box pressure can be auto controlled by PLC touch screen，Control accuracy:±1Pa，Can also be manually controlled by foot switch

Filter system ：The ends of inlet and outlet both are provided with filter，The filter precision is: 0.3 μm

Box Size：2400mm(L) x 750mm(W) x 900mm(H)

Box Support height： 900mm

Box Material： 304 Stainless Steel (Type 304), thickness 3mm

Power Supply ：110 - 220V AC, 50/60Hz, Single-phase

Environment of Box inside ：H2O <1 ppm (20°C/68 ℉, 1 atm)，O2 <1 ppm (20°C/68 ℉, 1 atm)

Antechamber

Main chamber size： Φ360mm (Dia.)x 600mm(length)（location: right-side of box）

Mini chamber size： Φ150 mm(Dia.) x 300mm(L)(location: right-side of box)

Pressure control system ：Box pressure can be auto controlled by PLC touch screen，Control accuracy:±1Pa，Can also be manually controlled by foot switch

Filter system ：The ends of inlet and outlet both are provided with filter，The filter precision is: 0.3 μm

Box Size：1200mm(L) x 1000mm(W) x 900mm(H)

Box Support height： 900mm

Box Material： 304 Stainless Steel (Type 304), thickness 3mm

Power Supply ：110 - 220V AC, 50/60Hz, Single-phase

Environment of Box inside ：H2O <1 ppm (20°C/68 ℉, 1 atm)，O2 <1 ppm (20°C/68 ℉, 1 atm)

Antechamber

Main chamber size： Φ360mm (Dia.)x 600mm(length)（location: right-side of box）

Mini chamber size： Φ150 mm(Dia.) x 300mm(L)(location: right-side of box)

Pressure control system ：Box pressure can be auto controlled by PLC touch screen，Control accuracy:±1Pa，Can also be manually controlled by foot switch

Filter system ：The ends of inlet and outlet both are provided with filter，The filter precision is: 0.3 μm

Box Size：1500mm(L) x 1000mm(W) x 900mm(H)

Box Support height： 900mm

Box Material： 304 Stainless Steel (Type 304), thickness 3mm

Power Supply ：110 - 220V AC, 50/60Hz, Single-phase

Environment of Box inside ：H2O <1 ppm (20°C/68 ℉, 1 atm)，O2 <1 ppm (20°C/68 ℉, 1 atm)

Antechamber

Main chamber size： Φ360mm (Dia.)x 600mm(length)（location: right-side of box）

Mini chamber size： Φ150 mm(Dia.) x 300mm(L)(location: right-side of box)

Pressure control system ：Box pressure can be auto controlled by PLC touch screen，Control accuracy:±1Pa，Can also be manually controlled by foot switch

Filter system ：The ends of inlet and outlet both are provided with filter，The filter precision is: 0.3 μm

Box Size：1800mm(L) x 1000mm(W) x 900mm(H)

Box Support height： 900mm

Box Material： 304 Stainless Steel (Type 304), thickness 3mm

Power Supply ：110 - 220V AC, 50/60Hz, Single-phase

Environment of Box inside ：H2O <1 ppm (20°C/68 ℉, 1 atm)，O2 <1 ppm (20°C/68 ℉, 1 atm)

Antechamber

Main chamber size： Φ360mm (Dia.)x 600mm(length)（location: right-side of box）

Mini chamber size： Φ150 mm(Dia.) x 300mm(L)(location: right-side of box)

Pressure control system ：Box pressure can be auto controlled by PLC touch screen，Control accuracy:±1Pa，Can also be manually controlled by foot switch

Filter system ：The ends of inlet and outlet both are provided with filter，The filter precision is: 0.3 μm

Box Size：2400mm(L) x 1000mm(W) x 900mm(H)

Box Support height： 900mm

Box Material： 304 Stainless Steel (Type 304), thickness 3mm

Power Supply ：110 - 220V AC, 50/60Hz, Single-phase

Environment of Box inside ：H2O <1 ppm (20°C/68 ℉, 1 atm)，O2 <1 ppm (20°C/68 ℉, 1 atm)

Antechamber

Main chamber size： Φ360mm (Dia.)x 600mm(length)（location: right-side of box）

Mini chamber size： Φ150 mm(Dia.) x 300mm(L)(location: right-side of box)

Pressure control system ：Box pressure can be auto controlled by PLC touch screen，Control accuracy:±1Pa，Can also be manually controlled by foot switch

Filter system ：The ends of inlet and outlet both are provided with filter，The filter precision is: 0.3 μm